Compact Series Interferometers, ZMI™ Series, ZYGO

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Compact Series Interferometers ZMI™ Series - Displacement Measuring Interferometers

The Compact Series interferometers have a low profile and use small 3-mm beams to accommodate small target mirrors. One, two, and three-axis versions are available.

Description:	Compact 1-Axis HSPMI	Compact 2-Axis HSPMI	Compact 3-Axis HSPMI
Part Number:	6191-0541-0X	6191-0542-0X	6191-0624-0X
Measurement:	Displacement	Displacement, yaw	Pitch, yaw, displacement
Number of axes:	1	2	3
Target:	Plane mirror
Optical Resolution:	λ/4
Maximum Input Beam Size:	3 mm
Vacuum Compatible Version Available:	Yes	Yes	No
Fiber Optic Pickup Mounting Method:	Mounted separately		Integrated
Interferometer Mount:	8050-0109-01	8050-0110-01	6191-0446-01
Precision Adjustable Mount:	6191-0310-03	6191-0310-04	6191-0310-01

ZYGO's Beam Reducing Telescope, P/N 6191-0372-01, can be used to reduce 6 mm beams to 3 mm beams suitable for the Compact Series interferometers. The Beam Reducing Telescope can be mounted on ZYGO's standard Interferometer Mount, P/N 6191-0446-01.

Spec Sheets