|
Optical Surface Profilers
Laser Interferometers
Semiconductor Systems
Flat Panel Metrology
Stage Position Metrology
Photovoltaic Panel Solutions
Testing & Certification Services
Laser Heads
Interferometers & Optics
Measurement Electronics
Cables & Feedthroughs
Example Systems
Standard Series
Differential Series
Compact Series
Beam splitters & Fold Mirrors
Fiber Optic Pickups
|
|
Differential Series Interferometers
ZMI™ Series - Displacement Measuring Interferometers
Differential interferometers measure relative displacement between two target mirrors. These interferometers will accommodate input beams up to 6 mm in diameter.
| Description: |
Column Reference Interferometer (CRI) |
Differential Plane Mirror Interferometer (DPMI) |
Compact Wavelength Compensator (CWC) |
| Part Number: |
6187-0100-01 |
6191-0188-02 |
6191-0584-01 |
| Measurement: |
Displacement |
Displacement or pitch or yaw |
Changes in refractive index |
| Number of axes: |
1 |
| Target: |
Two plane mirrors |
Vacuum cavity |
| Optical Resolution: |
λ/4 |
| Maximum Input Beam Size: |
6 mm |
| Vacuum Compatible Version Available: |
Yes |
No |
| Fiber Optic Pickup Mounting Method: |
Mounting features included |
Factory mounted |
| Interferometer Mount: |
– |
6191-0446-01 |
– |
| Precision Adjustable Mount: |
– |
6191-0310-01 |
– |
|
|
Note: Login Required to download Application Notes; Click for details.
Contact ZYGO today to learn more about ZMI™ Series Interferometers!
|