Standard Series Interferometers, ZMI™ Series, ZYGO

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Standard Series Interferometers ZMI™ Series - Displacement Measuring Interferometers

These single-axis interferometers will accommodate input beams up to 8 mm in diameter, for plane mirror or retro-reflector targets.

ZYGO's high performance High Stability Plane Mirror Interferometer (HSPMI) is shown at the right. It is vacuum compatible, and has a primary-to-secondary beam parallelism of 3 arc seconds: the best beam parallelism of all ZYGO's interferometers.

Description:	HSPMI	High performance HSPMI	Single beam Interferometer (SBI)	Linear Interferometer (LI)
Part Number:	6191-0318-0X	8080-0360-XX	6191-0553-01	6191-0135-01
Measurement:	Displacement
Number of axes:	1
Target:	Plane Mirror		Small Retroreflector 6191-0550-01	Std. Retroreflector 6191-0438-02
Optical Resolution:	λ/4		λ/2
Maximum Input Beam Size:	8 mm
Vacuum Compatible Version Available:	Yes
Fiber Optic Pickup Mounting Method:	Mounting features included	Factory mounted	Mounting features included
Interferometer Mount:	6191-0446-01		6191-0445-01	6191-0446-01
Precision Adjustable Mount:	6191-0310-01		6191-0310-02	6191-0310-01