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Stage Position Metrology
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Stage Position Metrology Laser Heads Interferometers & Optics Measurement Electronics Cables & Feedthroughs Example Systems |
Measurement Electronics ZMI™ Series - Displacement Measuring InterferometersZMI™ measurement electronics calculate displacement using optical signals from the interferometers and an optical reference signal from the laser. The ZMI™ 501A provides two axes of measurement in a stand-alone enclosure. All other ZMI™ measurement boards are used in a VME chassis. Multiple boards may be used together in the same chassis for applications requiring up to 64 axes of measurement.
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Spec Sheets
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Contact ZYGO today to learn more about ZMI™ Series Measurement Electronics!
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